MEMS Technology

Small is Beautiful

Create with Inspiration, Innovate with Perspiration

      Founded in July 2000, our research group targets the field of MEMS for the cultivation of excellent students. With an emphasis on the spirit of innovation and high quality up-stream research, it is our goal to integrate the principles of physics into each of our research subjects. This website serves to share what we have established in the areas of: MOEMS; tunable lasers; RF MEMS; PBG and Bio-chip research.

News

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Highlight of 2012 by Journal of Optics

A review paper entitled with “Micromachined tunable metamaterials: a review” was published by Professor Liu Ai Qun with his students in Journal of Optics, Vol 14, No. 114009, 2012. This review paper focuses on recent research progresses of tunable metamaterials with structural reconfiguration. This work has been selected by the editors of Journal of Optics for inclusion in the exclusive “Highlights of 2012” collection, which are chosen on the basis of referee endorsement, novelty, scientific impact and broadness of appeal.

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RF MEMS Book

RF MEMS Switches and Integrated Switching Circuits builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on RF MEMS switches and micromachined switching circuits, and presents a unified framework of coverage.

Link for details and purchase

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A New MEMS Book

An extension on traditional design and analysis, Photonic MEMS Devices- Design, Fabrication, and Control is the first photonic MEMS research text book written by Prof. Liu and his PhD students. This book is based on their more than five years research experience in the field of photonic MEMS.

Link for details and purchase

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Research News Highlight

An original research paper entitled “Determination of single living cell's dry/wet mass using optofluidic chip” was published by Associate Professor Liu Ai Qun with his students in Applied Physics Letters , vol 91, no 22, December 2007. The work focuses on the measurement of a single living cell's mass through the cell's refractive index using an optofluidic chip. This result was highlighted by two international media – Nature Photonics , vol 2, February 2008 p64 and Biophotonics International, February 2008, p50-51.

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A Coverpage Story of Applied Physics Letters

An original research paper entitled "Micromachined optical well structure for thermo-optic switching" was published by Associate Professor Liu Ai Qun with his students in Applied Physics Letters , vol 91 , no 26, 2007. This research paper focuses on optical switch through optical tunneling effect using micromachined fabrication processes. The work was highlighted by the front cover of the Applied Physics Letters and selected as one of the top 20 Most Downloaded Articles in January 2008.